Abstract: Significant effort is being dedicated to developing alternative materials whose optical properties can be controllably and reversibly modified. Here, we experimentally demonstrate the reversible non-volatile molybdenum oxides MoO3-to-MoO2 transition associated to a change from a metallic to a dielectric behavior through cycles of thermal annealing in air and hydrogen (H2). A full cycle is demonstrated by characterizing structurally and optically the transition using Raman spectroscopy and spectroscopic ellipsometry. The potential applicability of the metal-to-insulator transition in MoOx is benchmarked through comparison with a canonical Mott insulator VO2 in a reconfigurable reflective configuration as well as in cladded waveguide schemes.

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